Item

Specification

Objective Lens Magnification

5X

10X

20X

50X

100X

Observation Measurement Rang

Horizontal (μm)

1413

706

353

141

70

Vertical (μm)

±50

±40

±30

±10

±5

Height Measurement

(20X Standard)

Measurement Range

100μm (Step 40μm)

Accuracy

0.158μm

Repeatability (2δ)

0.158μm

Width Measurement

Accuracy

3μm (5X n.a = 0.1 Standard)

Repeatability (2δ)

3μm

Camera

Sensor Size

2048 x 2048 (pixel size: 3.45μm x 3.45μm)

Frame Memory

Monochrome

8 bit

Frame Through-put

Monochrome (Through-put)

1 Frame/GPU 1ea/1sec (Result)

Measurement Laser Light Source

Wavelength

RED 3ea

Output

50mW